发明名称 MULTI-PROBE CONTOUR-TYPE SENSOR FOR SCANNING PROBING MICROSCOPE
摘要 FIELD: microscopy. ^ SUBSTANCE: device has base, on which cantilevers are fixed with probes at ends, platform is inserted, base is made in form of flat body, on which along contour cantilevers are placed with probes at ends, and angles between longitudinal cantilevers axes are different from 0 and have positive values, while base is connected to platform with possible rotation and fixing relatively to it. ^ EFFECT: simplified maintenance, broader functional capabilities. ^ 10 cl, 6 dwg
申请公布号 RU2244256(C1) 申请公布日期 2005.01.10
申请号 RU20030116596 申请日期 2003.06.05
申请人 发明人 ALEKSEEV M.E.;BYKOV V.A.;SAUNIN S.A.
分类号 G01B5/28;G01Q70/18 主分类号 G01B5/28
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