| 摘要 |
PURPOSE: A multislot load lock chamber is provided to prevent process delay generated when a substrate which have passed through a process chamber is cooled by supplying a processed substrate to the process chamber while the substrate is cooled. CONSTITUTION: A multislot load lock chamber includes first and second cassette doors(401a,401b) for coming in and out of a substrate, a substrate loading portion(402) loading the substrate ejected from a cassette, and a driving motor(403) moving the substrate loading portion up and down. A connector(404) connects the substrate loading portion with the driving motor. A process chamber door(408) is connected with a process chamber formed at one side of the load lock chamber, and a sealing means is provided at an outer wall of the substrate loading portion. A sealing portion(409) is connected with the sealing means to partially seal the load lock chamber and is formed at a side inside the load lock chamber.
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