METHOD FOR FABRICATING ARRAY SUBSTRATE FOR LCD WITH DRIVING CIRCUIT BY REDUCING MASK PROCESSES

摘要

PURPOSE: A method for fabricating an array substrate for an LCD with a driving circuit is provided to reduce process steps and process time by reducing the number of process masks and to improve crystallization of an active layer by thinly forming a single layered gate electrode using a diffraction exposure unlike a double layered gate line. CONSTITUTION: In a method for fabricating an array substrate(101) for an LCD with a driving circuit, the array substrate includes a thin film transistor having a bottom gate structure instead of that having a top gate structure. After a gate line including a gate electrode(113), and a pixel electrode(110) are deposited, an active layer(124a) and a gate insulating layer are simultaneously etched. The pixel electrode adjoins drain electrodes without forming a contact hole by forming a data line including source and drain electrodes(140b,140a).