LASER IRRADIATION APPARATUS AND APPLICATION METHOD THEREOF FOR REDUCING DAMAGE OF MASK DUE TO LASER BEAMS BY REFLECTING SEQUENTIALLY LASER BEAMS TO DIFFERENT PATHS TO DIFFUSE LASER BEAMS ON MASK

摘要

PURPOSE: A laser irradiation apparatus and an application method thereof are provided to reduce damage of a mask due to laser beams by reflecting sequentially the laser beams to different paths to diffuse the laser beams on a mask. CONSTITUTION: A leaser beam generator(236) is used for generating laser beams. An optic system(240) is used for condensing the laser beams generated from the laser beam generator. A laser beam diffusion unit(250) diffuses laser beam pulses by reflecting sequentially the laser beams to different paths. A mask(238) includes a plurality of same patterns passing the laser beams. A moving stage(246) is used for moving a substrate on which the laser beams are irradiated.