ЧУВСТВИТЕЛЬНЫЙ ЭЛЕМЕНТ ИНТЕГРАЛЬНОГО АКСЕЛЕРОМЕТРА

摘要

FIELD: measurement technology. ^ SUBSTANCE: sensitive element is made of conductive monocrystalline silicon and has pendulum connected with frame edge by means of flexible suspensions. Frame is connected with carrier frame by means of cantilever beam. Carrier frame is rigidly connected to base of accelerometer by means of fitting platforms. Contact tensions in frame affecting precision of the device are reduced due to introduction of carrier frame, which is rigidly connected with base. ^ EFFECT: improved precision of measurement. ^ 1 dwg