LASER REPAIR APPARATUS AND METHOD, USING CLEANING-GAS SPRAYING NOZZLE

摘要

PURPOSE: A laser repair apparatus and method are provided to remove effectively residues of a fuse from a chip by using a cleaning-gas spraying nozzle. CONSTITUTION: A repair apparatus includes a cleaning-gas spraying nozzle, a supply pump and a gas controller. The cleaning-gas spraying nozzle(401) is used for spraying a cleaning gas on a wafer at a predetermined pressure. The supply pump(403) is used for supplying the cleaning gas to the cleaning-gas spraying nozzle. The gas controller(404) is connected with the supply pump to control the supply of cleaning gas.