| 摘要 |
PURPOSE: A composition for formation of a ferroelectric thin film, a ferroelectric thin film using the composition and its preparation method are provided, to prevent the generation of striation and to widen the selection width of a sol composition. CONSTITUTION: The composition comprises a metal compound; a hydrophobic compound having a reactive group reacting with a hydroxyl group and whose at least terminal part of residue except the reactive group is hydrophobic; and optionally diethanolamine as a hydrolysis inhibitor of a metal compound, polyethylene glycol as a stabilizer of a metal compound and/or 2-butoxyethanol as a solvent. Preferably the reactive group is at least one selected from the group consisting of a carboxyl group, a halogenated silane group, a hydroxysilane group and an alkoxysilane group. |
