METHOD OF INSPECTING SEMICONDUCTOR DEVICE TO ECONOMIZE COST AND TIME NECESSARY TO SET VARIABLES ON SAME PROCESS AGAIN

摘要

PURPOSE: A method of inspecting a semiconductor device is provided to economize cost and time necessary to set variables on the same process again by storing predetermined variables obtained from the inspection of a series of processes. CONSTITUTION: A first semiconductor substrate performed with a first process is introduced into first inspecting equipment(S310). First inspecting environment adequate for the first semiconductor substrate is set by changing repeatedly inspection conditions on the first semiconductor substrate in the first inspecting equipment. A surface state of the first semiconductor substrate is inspected by irradiating a ray of light on the first semiconductor substrate under the set first inspection environment(S330,S340). A second semiconductor substrate performed with the first process is introduced into the first inspecting equipment(S315). A surface state of the second semiconductor substrate is inspected by irradiating a ray of light on the second semiconductor substrate under the set first inspection environment(S325,S335,S345).