发明名称 CIRCULAR ARC REGION LIGHTING OPTICAL DEVICE AND PROJECTION ALIGNER USING IT
摘要 PROBLEM TO BE SOLVED: To light a circular arc region at high illuminance with less illuminance irregularities by fining the pitch of an interference pattern in a lighting device using a circular arc MLA. SOLUTION: The pitch of an interference pattern in a lit surface is fined by modulating a phase from an element lens of an MLA. For example, phase difference between adjacent element lenses is made 0°, 180°, 0°, 180°; thereby, the pitch of an interference pattern in a lit surface is made half as a whole by superposing a dark part of an interference pattern generated between element lenses of phase difference of 180°in a dark part of an interference pattern generated in element lenses of phase difference of 0°. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005005637(A) 申请公布日期 2005.01.06
申请号 JP20030170372 申请日期 2003.06.16
申请人 CANON INC 发明人 MORI KENICHIRO
分类号 G03F7/20;H01L21/027;(IPC1-7):H01L21/027 主分类号 G03F7/20
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