| 摘要 |
PROBLEM TO BE SOLVED: To increase the speed of analysis and to improve a response of countermeasure/recovery operation to abnormality, by systemizing and registering manual analytical routine work including countermeasure instructions also and integrating respective systems as a system capable of performing the mutual processing of data, while utilizing merits of respective distributed systems in a product abnormality recovery system for detecting abnormality such as flaws and the deposition of contaminations which may be comparatively easily detected. SOLUTION: A recovery system for analyzing abnormality such as flaws on the surface of a product and the deposition of contaminations is provided with a contamination management system, a progress management system, an equipment management system, an yield management system, and abnormality analysis. Countermeasures among respective systems are performed in accordance with a previously determined routine without requiring manual operation. COPYRIGHT: (C)2005,JPO&NCIPI
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