X-RAY FLUORESCENCE ANALYSIS METHOD FOR PLATING FILM

摘要

PROBLEM TO BE SOLVED: To easily and accurately measure composition even if a thin plating film like an electrode of an electronic part. SOLUTION: This is an X-ray fluorescence analysis method for the plating film 5 in the electronic part wherein a thick film electrode 3 is formed on a ceramic element assembly 2 and the plating films 4, 5 with a thickness D of 2μm≤D≤25μm. It is characterized by measuring the trace quantity Pb content in the plating film 5 with the fluorescent X ray of M-line sequence. COPYRIGHT: (C)2005,JPO&NCIPI