| 摘要 |
PROBLEM TO BE SOLVED: To develop improved vibration resistant performance in both vertical and horizontal directions by incorporating a gimbal mechanism into a piston of an air spring type isolator 3 (a vibration resistant device) and to secure sufficient durability and reliability by solving the problem with outgas for allowing the use under a ultra-high vacuum. SOLUTION: A metal welded bellows 14 having a plurality of annular thin plates superposed is adopted as a flexible member for holding a body 15 of a gimbal piston. An upward protruded spherical load supporting face 18b is provided at the upper end of a supporting rod 18 for supporting the load of a supported material. A radius of curvature R of the load supporting face 18b is set to be satisfied with a relational expression of 2×L>R>L, where L is the length of the supporting rod 18. COPYRIGHT: (C)2005,JPO&NCIPI
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