Apparatus for transporting plate-shaped work piece

摘要

It is an object to provide a plate-shaped work piece transporting apparatus provided with a blowing mechanism for contactlessly supporting a plate-shaped work piece that is transported, where the blowing mechanism is provided with a dust-removal filter and a blowing mechanism for sending air to the lower surface of the plate-shaped work piece via the dust-removal filter. In a first embodiment, a driving mechanism for contacting the plate-shaped work piece and moving it in the transporting direction is provided.