| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate container in which a substrate is prevented from rubbing against a retainer to become dirty or the position of the substrate is varied and in which the retainer is protected against creep deformation even after a continuous use and the position of the substrate is prevented from varying to cause a trouble in delivering/receiving work. SOLUTION: The substrate container comprises a front open box type container body 1 for containing semiconductor wafers W while arranging a pair of supporting units for supporting the semiconductor wafers W contained in the container body 1 while being arranged at the circumferential edge on the opposite sides, and a rear retainer 20 attached to the inner back of the container body 1 and supporting the circumferential edge at the rear end of the semiconductor wafers W. The rear retainer 20 has a base plate 21 with a plurality of grooves 27 formed vertically in the direction intersecting the containing direction of the semiconductor wafer W perpendicularly. Each groove 27 has a reverse V-shaped cross-section wherein the vicinity of the inclining face 26 is formed thick and the vicinity of a valley 25 for regulating the position of the semiconductor wafer W is formed thin to allow elastic deformation. COPYRIGHT: (C)2005,JPO&NCIPI |
