| 摘要 |
PROBLEM TO BE SOLVED: To provide a dark-field illuminator that realizes dark-field observation of superior contrast without being affected by increased brightness of illumination. SOLUTION: The dark-field illuminator is equipped with: an illumination light source 1 for emitting illumination light; a light shielding plate 3 for shielding a part of the illumination light emitted from the light source 1; an absorption type ND filter 4; and an cylindrical dark-field mirror 2 surrounding the light shielding plate 3 and the ND filter. The illumination light source 1, the light shielding plate 3 and the ND filter 4 are all situated on the optical axis O of an objective lens 6. The light shielding plate 3 is positioned between a specimen 7 and the illumination light source 1, selectively shielding the illumination light that directly enters the objective lens 6 from the light source 1. The inner surface 2a of the cylindrical dark-field mirror 2 is a mirror, reflecting to the specimen 7 the light that travels outside the illumination light shielded by the light shielding plate 3. The ND filter 4 is arranged between the specimen 7 and the light shielding plate 3 and is provided with a smooth surface 4a on the specimen 7 side. COPYRIGHT: (C)2005,JPO&NCIPI
|
