| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring method which enables a highly precise measurement of the shapes of objects to be measured without contact and also of sizes and shapes at high speeds without being affected by the condition of exposure of the objects to be measured to illumination, shape differences of the objects to be measured, or the like. SOLUTION: The object to be measured is imaged by an imaging means. Contrast data is acquired by relating coordinate values with a contrast level along at least one search line. On the basis of a prescribed boundary threshold value, the contrast data is divided into region data on the object to be measured and background region data. Adjacently present two items of contrast data are extracted from the region data on the object and the background region data. Coordinates acquired by internally dividing coordinate values of the two items of contrast data through the use of the ratio at which the contrast label of the extracted two items of contrast data is internally divided by the boundary threshold value are taken as boundary coordinate values. On the basis of the boundary coordinate values, the shape of the object is measured. COPYRIGHT: (C)2005,JPO&NCIPI
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