发明名称 Low power schottky emitter
摘要 A low input power consumption, compact thermal field emitter is suitable for use in electron beam systems, particularly those systems that use an array of electron beams or a miniature electron beam system. The thermal field emitter design reduces heat loss by reducing heat transfer to the base. To achieve reduced loses the design incorporates the use of high electrical resistivity, low thermal conductivity materials for construction of the filament posts and the filaments. Such materials further reduce heat loss and reduce input current requirements. In one embodiment, the base includes counterbores that reduce the heat conduction path between the filament posts and the base, and moves the contact area further from the filament.
申请公布号 US2005001220(A1) 申请公布日期 2005.01.06
申请号 US20040909621 申请日期 2004.08.02
申请人 FEI COMPANY 发明人 MAGERA GERALD G.;SCHWIND GREGORY A.;MCGINN JAMES B.;JUN DAVID S.
分类号 H01J9/02;H01J1/15;H01J1/304;H01J37/073;(IPC1-7):H01L27/15;H01L31/12;H01L33/00 主分类号 H01J9/02
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