发明名称 Etching mask
摘要 An etching mask includes a pass-through aperture for exposing only a surface to be etched, a protruding periphery portion that protrudes at the periphery of the pass-through aperture, and a recessed portion enclosed by the protruding periphery portion.
申请公布号 US2005000933(A1) 申请公布日期 2005.01.06
申请号 US20040777213 申请日期 2004.02.13
申请人 PIONEER CORPORATION 发明人 SHIRATORI MASAHIRO;NAGAYAMA KENICHI;YOSHIZAWA TATSUYA
分类号 H05B33/10;H01L21/033;H01L21/3065;H01L21/308;H01L51/40;H01L51/50;(IPC1-7):B44C1/22 主分类号 H05B33/10
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