发明名称 |
Crosslinkable elastomer composition and molded article produced from same |
摘要 |
To provide a crosslinkable elastomer composition which is excellent in mechanical properties, ensures a small amount of outgas such as DOP and is suitable as a very clean material for molded article for semiconductor production apparatuses. The composition comprises a crosslinkable elastomer component and ultra fine powders of silicon oxide, in which the ultra fine powders of silicon oxide have 100x10<19 >or less hydroxyl groups per gram on surfaces thereof, dioctylphthalate adsorption of not more than 8 mug per 1 g of silicon oxide and an average particle size of not more than 0.5 mum.
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申请公布号 |
US2005004298(A1) |
申请公布日期 |
2005.01.06 |
申请号 |
US20040901955 |
申请日期 |
2004.07.30 |
申请人 |
DAIKIN INDUSTRIES, LTD. |
发明人 |
TANAKA HIROYUKI;HASEGAWA MASANORI;NOGUCHI TSUYOSHI;HIGASHINO KATSUHIKO;NISHIMURA YOSUKE |
分类号 |
C08K9/02;C08K9/06;H01L23/29;(IPC1-7):C08K3/34 |
主分类号 |
C08K9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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