发明名称 Crosslinkable elastomer composition and molded article produced from same
摘要 To provide a crosslinkable elastomer composition which is excellent in mechanical properties, ensures a small amount of outgas such as DOP and is suitable as a very clean material for molded article for semiconductor production apparatuses. The composition comprises a crosslinkable elastomer component and ultra fine powders of silicon oxide, in which the ultra fine powders of silicon oxide have 100x10<19 >or less hydroxyl groups per gram on surfaces thereof, dioctylphthalate adsorption of not more than 8 mug per 1 g of silicon oxide and an average particle size of not more than 0.5 mum.
申请公布号 US2005004298(A1) 申请公布日期 2005.01.06
申请号 US20040901955 申请日期 2004.07.30
申请人 DAIKIN INDUSTRIES, LTD. 发明人 TANAKA HIROYUKI;HASEGAWA MASANORI;NOGUCHI TSUYOSHI;HIGASHINO KATSUHIKO;NISHIMURA YOSUKE
分类号 C08K9/02;C08K9/06;H01L23/29;(IPC1-7):C08K3/34 主分类号 C08K9/02
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