APPARATUS FOR PROCESSING OBJECT TO BE PROCESSED, PROCESSING METHOD THEREOF, PRESSURE CONTROL METHOD, METHOD FOR CARRYING OBJECT TO BE PROCESSED AND CARRIER APPARATUS TO SIMPLIFY OPERATION OF CARRYING OBJECT TO BE PROCESSED BETWEEN PROCESS SYSTEMS AND EFFICIENTLY PERFORM PLURAL TREATMENTS INCLUDING AT LEAST ONE VACUUM TREATMENT

摘要

PURPOSE: An apparatus for processing an object to be processed is provided to simplify an operation of carrying an object to be processed between process systems and efficiently perform a plurality of treatments including at least one vacuum treatment by interconnecting a plurality of process systems for processing the object to be processed wherein at least one of the process systems is a vacuum process system. CONSTITUTION: A plurality of process systems process an object to be processed, connected in columns and communicating with each other. A loadlock system includes a carrier unit for carrying in/out the object to be processed between the respective process systems, connected to the process system. At least one of the process systems is a vacuum process system. The loadlock system is disposed in a position in column with the process system.