MEMS VARIABLE OPTICAL ATTENUATOR HAVING MOVING OPTICAL WAVEGUIDE FOR APPROXIMATELY LINEARLY CHANGING AMOUNT OF ATTENUATION ACCORDING TO DRIVING VOLTAGE APPLIED TO MICRO ACTUATOR AND METHOD THEREOF

摘要

PURPOSE: A MEMS variable optical attenuator having a moving optical waveguide and a method for driving a moving optical waveguide are provided to control the amount of attenuation by using a driving voltage without using an additional voltage controlled circuit. CONSTITUTION: A substrate(60) has a flat upper surface. An optical transmission terminal(65a) and an optical reception terminal(65b) are aligned on the upper surface of the substrate. A moving optical waveguide(90) is installed at a position having a maximum attenuation value between the optical transmission terminal and the optical reception terminal. A micro actuator is arranged on the substrate in order to move the moving optical waveguide. A voltage supply unit provides a driving voltage to the micro actuator. The micro actuator is moved to reduce the amount of attenuation according to an increase of the driving voltage.