SEMICONDUCTOR DRY-ETCHING EQUIPMENT WITH ENHANCED SHOWER HEAD FOR PREVENTING DAMAGE OF SHOWER HEAD ITSELF AND SCOPE MODULE

摘要

PURPOSE: A bit of semiconductor dry-etching equipment with an enhanced shower head is provided to prevent the shower head itself and a scope module from being damaged due to a fluctuating flow by forming the shower head with ceramic and fixing the shower head to the scope module using a bolt. CONSTITUTION: A bit of semiconductor dry-etching equipment includes a process chamber, an upper and lower electrode spaced apart from each other in the chamber, a reaction gas supply line(41) for providing a reaction gas for the chamber, a pumping line for controlling inner pressure of the chamber, a scope module(6) connected with the reaction gas supply line in the chamber, and a shower head(7) made of ceramic on one end of the scope module. The shower head is stably connected with the scope module by using bolts.