| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide combustion-type detoxifying equipment capable of suppressing solid adhesion which could cause reduction in the degradation rate of gas subject to treatment, incomplete combustion or accidental fire, attaining a safe and stable combustion condition over a long period of time, without being complicated even when combustion treatment of noxious gas containing noxious gas components which generate solid particles is performed in the combustion-type detoxifying equipment for noxious gas being discharged during semiconductor manufacture. <P>SOLUTION: This combustion-type detoxifying equipment is provided with a means for generating ultrasonic vibrations for a combustion chamber wall and the upper surface of a flame-holding device where solid adhesion is easily deposited. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
