| 摘要 |
PROBLEM TO BE SOLVED: To provide a single-point measurement method of thermal diffusivity by a general-purpose nanoscale instrumentation technique for measuring the thermal diffusivity of a bulk body or a membrane on a nanoscale. SOLUTION: Data analysis processing is performed on aτvalue of matter, having a membrane or no membranes and its D value in the one-point measurement method to be performed by the TGC method through the use of a fitting function äS(t)=k[exp(-t/τ)]<SP>3</SP>} created for extracting both the D value, and itsτvalue, closest to a reference value by the Laser Flash Method (LFM) which has already been prepared, on the basis of Transient Grating Signal (TGS) data or a transient grating signal profile (TGS profile), acquired by measuring transient changes of the diffraction fringes of pump-pulsed light of a wavelength of 266 nm for providing high spatial resolution with respect to temperature changes in the surface of the matter. COPYRIGHT: (C)2005,JPO&NCIPI
|
