TWO-DIMENSIONAL OPTICAL MODULATING NANO APERTURE ARRAY APPARATUS AND SYSTEM FOR RECORDING HIGH SPEED NANO PATTERN USING THE SAME TO OVERCOME TECHNICAL LIMIT RELATIVE TO RESOLUTION

摘要

PURPOSE: A two-dimensional optical modulating nano aperture array apparatus is provided to overcome a technical limit relative to resolution by directly recording nano patterns in photoresist at high speed without using a photomask. CONSTITUTION: A spatial light modulating part controls the quantity of incident light by using the light quantity control cells arranged in the x-axis and y-axis directions. A microlens array focuses the light having passed through the light quantity control cell by using the microlenses arranged in the x-axis and y-axis directions. Light passes through a substrate bonded to the microlens array such that the substrate has a thickness of the focal distance of the microlens. The substrate is coated with a metal thin film. An aperture array is prepared in which openings for transmitting the light focused by the microlens are arranged in the metal thin in the x-axis and y-axis directions.