发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To lower the saturation voltage of a DMOS transistor without lowering breakdown strengths among each element of a bipolar transistor in a semiconductor device on which the bipolar transistor and the DMOS transistor are loaded. <P>SOLUTION: The semiconductor device has a p<SP>-</SP>silicon substrate 1, n<SP>-</SP>epitaxial growth layers 7a to 7c on the substrate 1, field insulating films 54a to 54h on the surface of the growth layer 7a, an n-p-n transistor formed on the growth layer 7a, a p-n-p transistor formed on the growth layer 7b, the DMOS transistor on the growth layer 7c and a resistor. The DMOS transistor contains an n<SP>+</SP>diffusion layer 21d as a source, a p-type diffusion layer 17e as a back gate region, and an n-type diffusion layer 67 in a low concentration as a drain and an n<SP>+</SP>diffusion layer 21e in a high concentration. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005005446(A) 申请公布日期 2005.01.06
申请号 JP20030166487 申请日期 2003.06.11
申请人 RENESAS TECHNOLOGY CORP 发明人 NAKAJIMA TAKASHI
分类号 H01L21/28;H01L21/336;H01L21/8249;H01L27/04;H01L27/06;H01L27/12;H01L29/06;H01L29/08;H01L29/10;H01L29/73;H01L29/732;H01L29/735;H01L29/78;H01L29/786 主分类号 H01L21/28
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