| 摘要 |
PROBLEM TO BE SOLVED: To provide an aperture for restraining the diffracted light component of passed light to a minimum. SOLUTION: The aperture 1 is constituted by forming through-holes 12 on a plate-like aperture body 11, the through-hole 12 causing light going toward a lighting part 3 to pass through and also removing the scattered light component R of the light. In the aperture 1, the thickness (d) of the aperture body 11 satisfies the following mathematical expression (1) when the refractive index of the aperture body 11 is (nf), the position of the through-hole 12 in a radial direction with a center axis as reference is (y), the wavelength of the light made incident on the through-hole 12 isλ, and a distance between the lighting part 3 and the main body 11 is L. COPYRIGHT: (C)2005,JPO&NCIPI
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