发明名称 Arrangement for preventing short-circuiting in a bipolar double-poly transistor and a method of fabricating such an arrangement
摘要 In a bipolar double-poly transistor comprising a layer of base silicon (1') on a silicon substrate (2'), a first layer of silicon dioxide (3') on the base silicon layer (1'), an emitter window (4') extending through the first layer (3') of silicon dioxide and the base silicon layer (1'), a second layer (5') of silicon dioxide in the emitter window (4'), silicon nitride spacers (6') on the second layer (5') of silicon dioxide in the emitter window (4'), and emitter silicon (9') in the emitter window (4'), an isolating silicon nitride seal is provided to separate the base silicon (1') from the emitter silicon (9') to prevent short-circuiting between the base silicon (1') and the emitter silicon (9') in the transistor.
申请公布号 US2005003623(A1) 申请公布日期 2005.01.06
申请号 US20040893604 申请日期 2004.07.16
申请人 JOHANSSON TED;NORSTROM HANS;LINDGREN ANDERS 发明人 JOHANSSON TED;NORSTROM HANS;LINDGREN ANDERS
分类号 H01L21/314;H01L21/331;H01L29/06;H01L29/08;H01L29/10;H01L29/732;(IPC1-7):H01L21/331 主分类号 H01L21/314
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