发明名称 Three-dimensional stacked substrate arrangements
摘要 Three-dimensional stacked substrate arrangements with reliable bonding and inter-substrate protection.
申请公布号 US2005003650(A1) 申请公布日期 2005.01.06
申请号 US20030610743 申请日期 2003.07.02
申请人 RAMANATHAN SHRIRAM;MORROW PATRICK;LIST SCOTT;CHAN MICHAEL Y.;KOBRINSKY MAURO J.;KIM SARAH E.;O'BRIEN KEVIN P.;HARMES MICHAEL C.;MARIEB THOMAS 发明人 RAMANATHAN SHRIRAM;MORROW PATRICK;LIST SCOTT;CHAN MICHAEL Y.;KOBRINSKY MAURO J.;KIM SARAH E.;O'BRIEN KEVIN P.;HARMES MICHAEL C.;MARIEB THOMAS
分类号 H01L21/60;H01L21/98;H01L25/065;(IPC1-7):H01L21/44;H01L23/02;H01L21/48;H01L23/52;H01L23/48 主分类号 H01L21/60
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