发明名称 |
METHOD OF CLEANING A COATED PROCESS CHAMBER COMPONENT |
摘要 |
In a method of cleaning and refurbishing a process chamber component having a metal coating having a surface thereon, the surface of the metal coating is immersed in an acidic solution to remove at least a portion of the process deposits from the surface. Thereafter, the surface of the metal coating is immersed in a basic solution to remove substantially all the metal coating. The component may optionally be bead blasting to roughen a surface of the component, and the metal coating may be reformed. |
申请公布号 |
WO2004048636(A3) |
申请公布日期 |
2005.01.06 |
申请号 |
WO2003US36376 |
申请日期 |
2003.11.12 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
WANG, HONG;HE, YONGXIANG;STOW, CLIFFORD, C. |
分类号 |
B24C1/00;C22B7/00;C23C14/56;C23F1/36;C23G1/12 |
主分类号 |
B24C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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