APPARATUS AND METHOD FOR MANUFACTURING BARRIER RIBS OF ORGANIC ELECTROLUMINESCENCE DEVICE, CAPABLE OF PREVENTING DAMAGE OF BARRIER RIBS BY ELIMINATING CLEANING PROCESS AFTER FORMATION OF BARRIER RIBS

摘要

PURPOSE: An apparatus and a method are provided to prevent damage of barrier ribs by eliminating a cleaning process after formation of barrier ribs, and perform processes including a barrier rib forming process to an ITO pre-treatment process in a single system. CONSTITUTION: A method for manufacturing barrier ribs of an organic electroluminescence device, comprises a first step of cleaning a substrate(216) on which a first electrode and an insulation film are formed; a second step of arranging a mask(218) on the substrate, and spraying an organic monomer(202) over the mask; a third step of depositing the organic monomer on a predetermined portion of the substrate by a plasma enhanced chemical vapor deposition(PECVD) process; and a fourth step of forming the deposited organic monomer into polymer barrier ribs(219).