METHOD FOR DETECTING ERRONEOUS PROJECTION OF LASER BEAM BY COMPARING LASER BEAM DRIVING SIGNAL WITH OSCILLATED FEEDBACK SIGNAL OF LASER BEAM

摘要

PURPOSE: A method for detecting an erroneous projection of a laser beam is provided to detect easily the erroneous projection by comparing a laser beam driving signal transmitted to a laser system with a feedback signal of the laser beam driving signal outputted to the laser system. CONSTITUTION: An RF amplifier receives laser shot driving signal from a control unit. A laser beam is irradiated to a target. The laser shot driving signal of the control unit is compared with a feedback signal of the laser shot driving signal of the RF amplifier transmitted to a laser system in order to determine whether a laser shot is erroneous projection or not(122). A position of the erroneous projection is detected when the laser shot is determined as the erroneous projection(123).