FILTER MANAGEMENT APPARATUS, FILTER MANAGEMENT METHOD AND APPARATUS FOR TREATING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To reduce a running cost of a filter for filtering washing water to be reused for the washing of a substrate. SOLUTION: A flow rate of the washing water flowing into the filter 5, which is measured by a flowmeter 8, is sent to a frequency control device 91 of a pump control device 9. The frequency control device 91 calculates a required driving frequency of the pump control device 9 based on the flow rate which is sent therefrom. A pump driving device 92 drives a pump 7 with a calculated driving frequency and always maintains constant in-flow rate of the washing water flowing into the filter 5. At this time, a frequency monitor device 94 monitors whether or not the driving frequency reaches the frequency set by an input means 93 in advance. When the driving frequency reaches the frequency set by the input means 93, an alarm device 95 is operated to request the replacement of the filter. COPYRIGHT: (C)2005,JPO&NCIPI