| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a crystal oscillator which forms a plurality of crystal oscillators on the same quartz plate and an MQCM (Multi Quartz Crystal Microbalance) sensor using the crystal resonator. SOLUTION: In the manufacturing method of the crystal oscillator which forms a coating film consisting of photopolymer on the quartz plate, forms a desired shape by exposing resin with exposed light by using a mask and performs batch dry etching processing of the quartz plate by using the resin shape, transmissivity of the exposed light transmitted the mask is controlled and the batch dry etching processing of the quartz plate is performed. COPYRIGHT: (C)2005,JPO&NCIPI
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