HIGH FREQUENCY SWITCH, UNIPOLAR DOUBLE THROW SWITCH, MULTIPOLAR MULTIPLE THROW SWITCH

摘要

PROBLEM TO BE SOLVED: To provide a low height high frequency switch for a microwave band or the like having a small electromagnetic interference with other elements arranged closely. SOLUTION: The high frequency switch comprises a pair of signal lines provided with a space on the inside surface of the cavity of a substrate, a pair of first electrodes left some space with the pair of the signal lines and extended from the inside of the cavity towards the front surface of the substrate on both sides of the signal lines, a flexible dielectric member straddled over both edges of the cavity and supported on its both sides on the substrate having flexible elasticity between a close position proximate to the pair of the signal lines and a separated position separated from the pair of the signal lines, a conductive member fixed to the rear side of the flexible dielectric member for conducting continuity between the pair of the signal lines when the flexible dielectric member locates in the close position, and a second electrode fixed to the front side of the flexible dielectric member for respectively electrostatic coupling to the pair of first electrodes through the flexible dielectric member and for generating suction force to flex the flexible dielectric member. COPYRIGHT: (C)2005,JPO&NCIPI