摘要 |
<P>PROBLEM TO BE SOLVED: To provide an oxide dielectric having high Q value, high dielectric constant and excellent stability to temperature by reducing the quantity of impurity in a TiO<SB>2</SB>-ZrO<SB>2</SB>-SnO<SB>2</SB>-based oxide dielectric, and a method of manufacturing the oxide dielectric at a low cost. <P>SOLUTION: The oxide dielectric is obtained by heating a solution containing nitrates of zirconium, titanium and tin and an amino acid to prepare TiO<SB>2</SB>-ZrO<SB>2</SB>-SnO<SB>2</SB>-based oxide powder and sintering it. The oxide is obtained as fine powder having high purity, high homogeneity and narrow grain size distribution by the method in which the raw materials are relatively easily highly purified and the oxide is formed by a homogeneous reaction in the solution. Then, the oxide dielectric obtained by sintering the oxide powder exhibits excellent characteristics. <P>COPYRIGHT: (C)2005,JPO&NCIPI |