| 发明名称 |
SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a new method for making conductor paths and resistors on a semiconductor device. SOLUTION: In this method, at least one of conductor path and/or at least one of resistor is formed by deeply oxidizing a conductive layer in a partial region to electrically isolate at least one area of the conductive layer from the other areas. COPYRIGHT: (C)2005,JPO&NCIPI |
| 申请公布号 |
JP2005005678(A) |
申请公布日期 |
2005.01.06 |
| 申请号 |
JP20040105721 |
申请日期 |
2004.03.31 |
| 申请人 |
ROBERT BOSCH GMBH |
发明人 |
WEBER HERIBERT;SCHELLING CHRISTOPH |
| 分类号 |
H01L21/3205;H01L21/768;H01L23/34;H01L23/522;(IPC1-7):H01L21/320 |
主分类号 |
H01L21/3205 |
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