APPARATUS MANUFACTURED BY CONTROLLING PIEZOELECTRIC COUPLING FACTOR IN THIN FILM BULK ACOUSTIC RESONATOR

摘要

PROBLEM TO BE SOLVED: To provide an improved method to control a piezoelectric coupling factor in a thin film bulk acoustic resonator.

SOLUTION: There are provided a lower electrode (32), a composite layer (34) which is located on the lower electrode (32) and has a piezoelectric layer (34a) with a first coupling factor and a coupling factor control layer (34b) with a second coupling factor, and an apparatus (30) which is provided with an upper electrode (36) above the composite layer (34) and is manufactured on a substrate (12).

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