| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment device capable of detecting a mark formed on a transmitting substrate even from either surface side of the substrate and an exposure device. SOLUTION: In the alignment device Al aligning the substrate W on which a specified pattern PA is transferred, and the specified pattern PA; the transmitting substrate W is used as the substrate W, and the device AL has a detecting system 10 detecting the mark formed on a second surface reverse to a first surface through the transmitting substrate W from the first surface side of the transmitting substrate W, on which the specified pattern PA is transferred. COPYRIGHT: (C)2005,JPO&NCIPI |
