摘要 |
PROBLEM TO BE SOLVED: To provide a differential pressure and pressure transmitter for normally measuring static pressure even if a protection mechanism operates by the occurrence of an excessive pressure and a differential pressure cannot be measured. SOLUTION: High-pressure-side and low-pressure-side pressure receiving diaphragms 6, 7, a center diaphragm 8, and a pressure sensor 9 for measuring differential pressure are provided at a body 2 for measuring the differential pressure. A diaphragm 72 for measuring a static pressure, a diaphragm chamber 73 for measuring a static pressure, and a pressure sensor 10 for measuring a static pressure are provided at a body 31 for measuring static pressure. When the pressure receiving diaphragm 72 for measuring a static pressure is displaced by high pressure HP, the pressure is transmitted also to the high-pressure side pressure receiving diaphragm 6 via a sealing liquid 3. High pressure HP and low pressure LP applied to the high-pressure side and low-pressure side pressure receiving diaphragms 6, 7 are guided to the pressure sensor 9 for measuring differential pressure via the sealing liquid 3, and the differential pressure is measured. The high pressure HP applied to the pressure receiving diaphragm 72 for measuring the static pressure is guided to the pressure sensor 10 via the sealing liquid 3 for measuring vacuum pressure as reference pressure. COPYRIGHT: (C)2005,JPO&NCIPI
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