Method and apparatus for monitoring the purity and/or quality of steam

摘要

A method and apparatus for monitoring at least one of steam purity and steam quality for steam used in a decontamination process. A capacitor is exposed to the steam, wherein the steam acts as a dielectric between the plates of the capacitor. Permittivity of the dielectric is affected by the purity and/or quality of the steam, and thus a measurement of electrical properties of the capacitor is used to monitor steam purity and/or quality.