RADIAL BULK ANNULAR RESONATOR USING MEMS TECHNOLOGY

摘要

A MEMS resonator includes an annular resonator body defined by an inner radi us and an outer radius, a first electrode positioned within the inner radius an d spaced from the resonator body, and a second electrode positioned around the annular resonator body and spaced from the outer radius. The first electrode and the second electrode provide for capacitive drive of the resonator body and capacitive sense of the resonator body. Piezo-resistive sense and piezoelectric drive/sense techniques can also be utilized. The overall extan t can be smaller than 1 cm2 in area and positioned on a supporting substrate b y a plurality of anchors. The substrate can comprise an RF transceiver integrated circuit with the anchors connecting the drive electrode and sense electrode to the integrated circuit. The resonator is readily fabricated usi ng conventional semiconductor integrated circuit fabrication techniques.