| 摘要 |
PROBLEM TO BE SOLVED: To simplify the mechanism for alignment of substrate. SOLUTION: In the alignment apparatus 24, four pressing mechanisms 24A to 24D are radially allocated on a turning base 20 to push the four angled portions 12A to 12D of a glass substrate 12 toward the center from the diagonal directions. The pressing mechanisms 24A to 24D are formed of a pair of pressing pins 28, 29 to push the angled portions 12A 12D of the glass substrate 12, four slide arms 30 to 33 for supporting the pressing pins 28, 29, cams 40 to 43 to push the ends of the slide arms 30 to 33 provided to a drive shaft 36, coil springs 44 to 47 for biasing the slide arms 30 to 33 to slide in contact with the cams 40 to 43, and a drive mechanism 34 for driving the slide arms 30 to 33 in the diagonal direction. Since a plurality of slide arms 30 to 33 are driven in the diagonal directions with only one drive mechanism 34, structure can be simplified. COPYRIGHT: (C)2005,JPO&NCIPI |
