| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a hazardous gas detection means capable of accurately detecting the stages of progress of a reaction part of the purification agent with the hazardous gas ingredient or an adsorption part of the hazardous gas ingredient by the purification agent in a method purifying hazardous gas discharged from a semiconductor manufacturing process etc. by contacting it with a purification agent filled in a purification cylinder and detecting the hazardous gas ingredient contained in gas passing a filling part of the purification agent. <P>SOLUTION: Using a storage container comprising a filling part of the detection agent, a gas introduction part taking the gas in the container and introducing it to the filling part of the detection agent and a gas discharge part discharging the gas passing the filling part of the detection agent out of the container, after filling the container with the detection agent, and installing it so that the gas can be taken in from a desired position of a purification agent layer, the introduced gas is contacted with the detection agent and analyzed. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
