DEVICE AND METHOD FOR EXPOSING, AND POLARIZATION STATE MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an aligner capable of determining the appropriate polarization state of illuminating light to a mask and obtaining a desired polarization state with appropriate optical adjustment as required. SOLUTION: The aligner having illuminating systems (1 to 8) for illuminating the mask (M) and exposing a pattern formed on the mask to a photosensitive plate (W) has a polarized state measuring means (9) for measuring the polarized state of the illuminating light to at least either of the mask or the photosensitive plate. The illuminating system also has a polarized state variable means (3) for varying the polarized state of the illuminating light to the mask. COPYRIGHT: (C)2005,JPO&NCIPI