CERIUM BASED POLISHING MATERIAL AND RAW MATERIALS THEREFOR

摘要

A cerium-based polishing material which comprises cerium oxide (CeO2), lanthanum oxide (La2O3) and neodymium oxide(Nd2O3), as rare earth element oxides, and also fluorine (F), characterized in that it has a proportion in weight of the total rare earth elements in terms of oxide (TREO) of 90 wt % or more, a proportion of the weight of cerium oxide in the weight of the total rare earth elements in terms of oxide (CeO2/TREO) is 50 to 65 wt %, and a proportion of the weight of neodymium oxide in the weight of the total rare earth elements in terms of oxide (Nd2O3/TREO) is 10 to 16 wt %. The cerium-based polishing material has excellent polishing characteristics such as the reduction in the generation of flaws and also exhibits enhanced polishing speed.