METHOD FOR FABRICATING ANATASE TITANATE TARGET TO FORM TARGET WITH HIGH PURITY AND GOOD ADHESIVE FORCE

摘要

PURPOSE: A method for fabricating an anatase titanate target is provided to form a target with high purity and good adhesive force by using a physical method using anatase TiO2 powder. CONSTITUTION: A mixing process is performed on an unprocessed material for 24 hours. The unprocessed material is dried for 12 hours. A calcination process is performed on the unprocessed material in an electrical furnace at a temperature of 800 deg.C for an hour. The unprocessed material undergoes a mixing process for 24 hours and is dried for 12 hours. A mold is formed by a pressure of 500 kilograms/square centimeter. A sintering process is performed on the unprocessed material at a temperature of 900-1300 deg.C for 2 hours.