| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem of generation of a strong alkaline solution due to mixing of a resist stripper and washing water without using a substitution liquid. SOLUTION: A board 40 is made to pass through a stripping zone 10, a liquid avoiding zone 20 and a substitution zone 30 in order. In the zone 10, after the stripper is supplied to the surface of the board 40 by a shower unit 11, the stripper remaining on the surface of the board 40 with an air knife formed of air nozzles 12 and 12 formed at an exit part. In the substitution zone 30, the cleaning water is supplied to the surface of the board 40 with a water knife formed of a water nozzle 31 formed at an entrance part and thereafter, the cleaning water is showered to the surface of the board 40 with a shower unit 33. In order to prevent spreading of the cleaning water to an upstream side, the air knife is formed of the air nozzle 32 provided on the upstream side of the water nozzle 31, and inside of the liquid avoiding zone 20 is managed to have positive pressure. COPYRIGHT: (C)2005,JPO&NCIPI
|
