| 摘要 |
PROBLEM TO BE SOLVED: To consistently maintain arc discharge in a vacuum arc evaporation source even in the case of low-arc current operation or in the case of a cathode formed of a material of high melting point. SOLUTION: The vacuum arc vapor deposition apparatus has an arc power source 30 to supply the arc current I<SB>A</SB>of triangular waveform to a vacuum arc evaporation source 12 as the arc power source for the vacuum arc evaporation source 12. The arc power source 30 comprises a square wave power source 32 to output the square wave voltage V<SB>R</SB>and an inductor 38 connected in series between the square wave power source 32 and the vacuum arc evaporation source 12. COPYRIGHT: (C)2005,JPO&NCIPI
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