| 摘要 |
PROBLEM TO BE SOLVED: To provide a nozzle apparatus which prevents diffusion to the surroundings of the mist produced when a substrate is treated with a treating liquid pressurized by pressurized air. SOLUTION: The nozzle apparatus is provided with a nozzle body 61, a mixing chamber disposed on the nozzle body, a jetting part which is disposed on the nozzle body and is communicated with the mixing chamber, first and second connection holes which are disposed on the nozzle body and feed the liquid to the mixing chamber, a third connection hole which is disposed on the nozzle body and supplies the pressurized air for pressurizing the liquid fed to the mixing chamber and jetting the pressurized liquid from the jetting part, and a cover body 81 which is disposed on the nozzle body and eliminates the liquid scattered to the surroundings of the nozzle body, among the liquid pressurized by the pressurized air and jetted toward the substrate from the jetting part. COPYRIGHT: (C)2005,JPO&NCIPI
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